| Title: |
First Monolithic Integration of 3D Complementary FET (CFET) on 300mm Wafers |
| Authors: |
Subramanian, S.; Hosseini, M.; Chiarella, T.; Sarkar, S.; Schuddinck, P.; Chan, B. T.; Radisic, D.; Mannaert, G.; Hikavyy, A.; Rosseel, E.; Sebaai, F.; Peter, A.; Hopf, T.; Morin, P.; Wang, S.; Devriendt, K.; Batuk, D.; Martinez, G. T.; Veloso, A.; Litta, E. Dentoni; Baudot, S.; Siew, Y. K.; Zhou, X.; Briggs, B.; Capogreco, E.; Hung, J.; Koret, R.; Spessot, A.; Ryckaert, J.; Demuynck, S.; Horiguchi, N.; Boemmels, J. |
| Source: |
2020 IEEE Symposium on VLSI Technology VLSI Technology, 2020 IEEE Symposium on. :1-2 Jun, 2020 |
| Relation: |
2020 IEEE Symposium on VLSI Technology |
| Database: |
IEEE Xplore Digital Library |