| Title: |
First Demonstration of Low Temperature (≤500°C) CMOS Devices Featuring Functional RO and SRAM Bitcells toward 3D VLSI Integration |
| Authors: |
Fenouillet-Beranger, C.; Brunet, L.; Batude, P.; Brevard, L.; Garros, X.; Frutuoso, T. Mota; Casse, M.; Lugo, J.; Lacord, J.; Bosch, D.; Bernard, N.; Magalhaes-Lucas, A.; Ribotta, M.; Sklenard, B.; Milesi, F.; Kies, R.; Romano, G.; Acosta-Alba, P.; Kerdiles, S.; Tavernier, A.; Vizioz, C.; Besson, P.; Gassilloud, R.; Kanyandekwe, J.; Cooper, D.; Lapras, V.; Kim, W. H.; Sasaki, Y.; Oh, S.; Kang, P.; Lee, S. W.; Na, H.; Arcamone, J.; Andrieu, F. |
| Source: |
2020 IEEE Symposium on VLSI Technology VLSI Technology, 2020 IEEE Symposium on. :1-2 Jun, 2020 |
| Relation: |
2020 IEEE Symposium on VLSI Technology |
| Database: |
IEEE Xplore Digital Library |