| Title: |
Integration feasibility of porous SiLK* semiconductor dielectric |
| Authors: |
Waeterloos, J.J.; Struyf, H.; Van Aelst, J.; Castillo, D.W.; Lucero, S.; Caluwaerts, R.; Alaerts, C.; Mannaert, G.; Boullart, W.; Sleeckx, E.; Schaekers, M.; Tokel, Z.; Vervoort, I.; Steenbergen, J.; Sijmus, B.; Vos, I.; Meuris, M.; Iacopi, F.; Donaton, R.A.; Van Hove, M.; Vanhaelemeersch, S.; Maex, K. |
| Source: |
Proceedings of the IEEE 2001 International Interconnect Technology Conference (Cat. No.01EX461) Interconnect technology conference Interconnect Technology Conference, 2001. Proceedings of the IEEE 2001 International. :253-254 2001 |
| Relation: |
Proceedings of the IEEE 2001 International Interconnect Technology Conference |
| Database: |
IEEE Xplore Digital Library |