| Title: |
Predictive Maintenance of Pump and Abatement Equipment in a 300mm Semiconductor Fab |
| Authors: |
LaRose, J.D.; Barker, John; Finlay, Boyd; Trinidad, Alex; Guyer, Carmen; Weinstein, Justin; Conerney, Brian; Ray, Dana; Perry, John; Tarnawskyj, Walter; Lansford, Jeremy |
| Source: |
2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Advanced Semiconductor Manufacturing Conference (ASMC), 2021 32nd Annual SEMI. :1-4 May, 2021 |
| Relation: |
2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| Database: |
IEEE Xplore Digital Library |