| Title: |
Characteristics of argon-ion-implanted amorphous-InGaZnO |
| Authors: |
Yasuta, K.; Ui, T.; Ikeda, T.; Matsuo, D.; Sakai, T.; Dohi, S.; Setoguchi, Y.; Takahashi, E.; Andoh, Y.; Tatemichi, J. |
| Source: |
2021 28th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) Active-Matrix Flatpanel Displays and Devices (AM-FPD), 2021 28th International Workshop on. :77-80 Jun, 2021 |
| Relation: |
2021 28th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) |
| Database: |
IEEE Xplore Digital Library |