| Title: |
Si/Si0.7Ge0.3 A2RAM nanowires fabrication and characterization for 1T-DRAM applications |
| Authors: |
Lacord, J.; Wakam, F. Tcheme; Chalupa, Z.; Hartmann, J.-M.; Besson, P.; Loup, V.; Vizioz, C.; Brevard, L.; Aussenac, F.; Mescot, X.; Lee, K.; Bawedin, M. |
| Source: |
2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS) Ultimate Integration on Silicon (EuroSOI-ULIS), 2021 Joint International EUROSOI Workshop and International Conference on. :1-4 Sep, 2021 |
| Relation: |
2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS) |
| Database: |
IEEE Xplore Digital Library |