| Title: |
Thermal Stability of Ferroelectricity in Hafnia-Zirconia-Alumina Buried Oxide Stacks |
| Authors: |
Tikhonenko, Fedor; Antonov, Valentin; Popov, Vladimir; Miakonkikh, Andrey; Rudenko, Konstantin |
| Source: |
2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS) Ultimate Integration on Silicon (EuroSOI-ULIS), 2021 Joint International EUROSOI Workshop and International Conference on. :1-4 Sep, 2021 |
| Relation: |
2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS) |
| Database: |
IEEE Xplore Digital Library |