| Title: |
Effect of Oxygen Partial Pressure on the Properties ZnO Film Grown on Macroporous Si by HF Magnetron Sputtering |
| Authors: |
Kidalov, Valeriy; Dyadenchuk, Alena; Baturin, Vladimir; Karpenko, Olexander; Rogozin, Igor; Bacherikov, Yuriy; Sosnytska, Natalia; Zhuk, Anton; Kidalov, Vitali |
| Source: |
2021 IEEE 11th International Conference Nanomaterials: Applications & Properties (NAP) Nanomaterials: Applications & Properties (NAP), 2021 IEEE 11th International Conference. :1-5 Sep, 2021 |
| Relation: |
2021 IEEE 11th International Conference Nanomaterials: Applications & Properties (NAP) |
| Database: |
IEEE Xplore Digital Library |