Investigating Stability of Si Sphere Surface Layer in Ambient–Vacuum Cyclic Measurements Using Ellipsometry
| Title: | Investigating Stability of Si Sphere Surface Layer in Ambient–Vacuum Cyclic Measurements Using Ellipsometry |
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| Authors: | Fujita, K.; Fujii, K.; Zhang, L.; Azuma, Y.; Mizushima, S.; Kuramoto, N. |
| Source: | IEEE Transactions on Instrumentation and Measurement IEEE Trans. Instrum. Meas. Instrumentation and Measurement, IEEE Transactions on. 71:1-9 2022 |
| Database: | IEEE Xplore Digital Library |