| Title: |
Comparative analysis of 300 mm FAB architectures impact of equipment sets on wafer cost and dynamic performance |
| Authors: |
Bachrach, R.; Pool, M.; Genovese, K.; Moran, J.C.; O'Halloran, M.D.; Connolly, T.J. |
| Source: |
2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) Semiconductor manufacturing Semiconductor Manufacturing Symposium, 2001 IEEE International. :369-372 2001 |
| Relation: |
2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings |
| Database: |
IEEE Xplore Digital Library |