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Development of Isolated CMOS and HV MOSFET on an N- epi/P- epi/4H-SiC N+ Substrate for Power IC Applications

Title: Development of Isolated CMOS and HV MOSFET on an N- epi/P- epi/4H-SiC N+ Substrate for Power IC Applications
Authors: Isukapati, Sundar Babu; Morgan, Adam J; Sung, Woongje; Zhang, Hua; Liu, Tianshi; Fayed, Ayman; Agarwal, Anant K.; Ashik, Emran; Lee, Bongmook
Source: 2021 IEEE 8th Workshop on Wide Bandgap Power Devices and Applications (WiPDA) Wide Bandgap Power Devices and Applications (WiPDA), 2021 IEEE 8th Workshop on. :118-122 Nov, 2021
Relation: 2021 IEEE 8th Workshop on Wide Bandgap Power Devices and Applications (WiPDA)
Database: IEEE Xplore Digital Library