| Title: |
Infrared interface analysis of high-k dielectrics deposited by atomic layer chemical vapour deposition |
| Authors: |
Cosnier, V.; Bender, H.; Caymax, A.; Chen, J.; Conard, T.; Nohira, H.; Richard, O.; Tsai, W.; Vandervorst, W.; Young, E.; Zhao, C.; De Gendt, S.; Heyns, A.; Maes, J.W.H.; Tuominen, M.; Rochat, N.; Olivier, M.; Chabli, A. |
| Source: |
Extended Abstracts of International Workshop on Gate Insulator. IWGI 2001 (IEEE Cat. No.01EX537) Gate insulator Gate Insulator, 2001. IWGI 2001. Extended Abstracts of International Workshop on. :226-229 2001 |
| Relation: |
Extended Abstracts of International Workshop on Gate Insulator. IWGI 2001 |
| Database: |
IEEE Xplore Digital Library |