| Title: |
Comparison of Electrical Performance of Co-Integrated Forksheets and Nanosheets Transistors for the 2nm Technological Node and Beyond |
| Authors: |
Ritzenthaler, R.; Mertens, H.; Eneman, G.; Simoen, E.; Bury, E.; Eyben, P.; Bufler, F. M.; Oniki, Y.; Briggs, B.; Chan, B.T.; Hikavyy, A.; Mannaert, G.; Parvais, B.; Chasin, A.; Mitard, J.; Litta, E. Dentoni; Samavedam, S.; Horiguchi, N. |
| Source: |
2021 IEEE International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2021 IEEE International. :26.2.1-26.2.4 Dec, 2021 |
| Relation: |
2021 IEEE International Electron Devices Meeting (IEDM) |
| Database: |
IEEE Xplore Digital Library |