| Title: |
Low-temperature atomic and molecular hydrogen anneals for enhanced chemical $\mathbf{SiO}_{2}$ IL quality in low thermal budget RMG stacks |
| Authors: |
Franco, J.; Arimura, H.; de Marneffe, J.-F.; Wu, Z.; Vandooren, A.; Ragnarsson, L.-A; Litta, E. Dentoni; Horiguchi, N.; Croes, K.; Linten, D.; Afanas'ev, V.; Grasser, T.; Kaczer, B. |
| Source: |
2021 IEEE International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2021 IEEE International. :31.4.1-31.4.4 Dec, 2021 |
| Relation: |
2021 IEEE International Electron Devices Meeting (IEDM) |
| Database: |
IEEE Xplore Digital Library |