| Title: |
Buried Power Rail Metal exploration towards the 1 nm Node |
| Authors: |
Gupta, A.; Radisic, D.; Maes, J. W.; Pedreira, O. Varela; Soulie, J-P.; Jourdan, N.; Mertens, H.; Bandyopadhyay, S.; Le, Q. T.; Pacco, A.; Heylen, N.; Vandersmissen, K.; Devriendt, K.; Zhu, C.; Datta, S.; Sebaai, F.; Wang, S.; Mousa, M.; Lee, J.; Geypen, J.; De Wachter, B.; Chehab, B.; Salahuddin, S. M.; Murdoch, G.; Biesemans, S.; Tokei, Zs.; Litta, E. Dentoni; Horiguchi, N. |
| Source: |
2021 IEEE International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2021 IEEE International. :22.5.1-22.5.4 Dec, 2021 |
| Relation: |
2021 IEEE International Electron Devices Meeting (IEDM) |
| Database: |
IEEE Xplore Digital Library |