A Holistic Evaluation of Buried Power Rails and Back-Side Power for Sub-5 nm Technology Nodes
| Title: | A Holistic Evaluation of Buried Power Rails and Back-Side Power for Sub-5 nm Technology Nodes |
|---|---|
| Authors: | Nibhanupudi, S.S.T.; Prasad, D.; Das, S.; Zografos, O.; Robinson, A.; Gupta, A.; Spessot, A.; Debacker, P.; Verkest, D.; Ryckaert, J.; Hellings, G.; Myers, J.; Cline, B.; Kulkarni, J.P. |
| Source: | IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 69(8):4453-4459 Aug, 2022 |
| Database: | IEEE Xplore Digital Library |