Explainable Deep Learning System for Advanced Silicon and Silicon Carbide Electrical Wafer Defect Map Assessment
| Title: | Explainable Deep Learning System for Advanced Silicon and Silicon Carbide Electrical Wafer Defect Map Assessment |
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| Authors: | Sarpietro, R.E.; Pino, C.; Coffa, S.; Messina, A.; Palazzo, S.; Battiato, S.; Spampinato, C.; Rundo, F. |
| Source: | IEEE Access Access, IEEE. 10:99102-99128 2022 |
| Database: | IEEE Xplore Digital Library |