A Novel Ni-Al Alloy Metal Induced Lateral Crystallization Process for Improved Channel Conduction in 3-D NAND Flash
| Title: | A Novel Ni-Al Alloy Metal Induced Lateral Crystallization Process for Improved Channel Conduction in 3-D NAND Flash |
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| Authors: | Ramesh, S.; Banerjee, K.; Opsomer, K.; Rachita, I.; Bastos, J.P.; Soulie, J.; Sebaai, F.; Favia, P.; Korytov, M.; Richard, O.; Breuil, L.; Arreghini, A.; Van Den Bosch, G.; Rosmeulen, M. |
| Source: | IEEE Electron Device Letters IEEE Electron Device Lett. Electron Device Letters, IEEE. 43(12):2085-2088 Dec, 2022 |
| Database: | IEEE Xplore Digital Library |