| Title: |
Characterization analysis of aluminum pad discoloration and ions contamination monitor of wafer storage environment |
| Authors: |
Su, Frank; Tu, Ray; Hsieh, W.F.; Lin, Henry; Chen, Vincent; Ou, Irene; Lou, Y.S. |
| Source: |
2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) Physical and Failure Analysis of Integrated Circuits (IPFA), 2022 IEEE International Symposium on the. :1-5 Jul, 2022 |
| Relation: |
2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) |
| Database: |
IEEE Xplore Digital Library |