Detailed analysis of flow-induced thermal mechanisms in sub-micron MEMS-based VOC biosensors: A design solution for the nanometer scale
| Title: | Detailed analysis of flow-induced thermal mechanisms in sub-micron MEMS-based VOC biosensors: A design solution for the nanometer scale |
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| Authors: | Perello-Roig, R.; Verd, J.; Bota, S.; Segura, J. |
| Source: | 2022 IEEE 22nd International Conference on Nanotechnology (NANO) Nanotechnology (NANO), 2022 IEEE 22nd International Conference on. :149-152 Jul, 2022 |
| Relation: | 2022 IEEE 22nd International Conference on Nanotechnology (NANO) |
| Database: | IEEE Xplore Digital Library |