| Title: |
Module optimization modeling with discrete event simulation |
| Authors: |
Bachrach, R.Z.; Pool, M.; Sunkara, R.; Pang, B. |
| Source: |
Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) Semiconductor manufacturing Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on. :347-350 2000 |
| Relation: |
Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing |
| Database: |
IEEE Xplore Digital Library |