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High-Throughput Density Characterization of Combinatorial Thin Films Using X-ray Reflectivity

Title:	High-Throughput Density Characterization of Combinatorial Thin Films Using X-ray Reflectivity
Authors:	Addamane, Sadhvikas J.^{Aff1, Aff2, IDs11664025125912_cor1}; Dorman, Kyle R.^Aff2; Desai, Saaketh^Aff2; Rodriguez, Mark A.^Aff2; Heile, Jonathan^Aff2; Wampler, William^Aff2; Dingreville, Remi^{Aff1, Aff2}; Adams, David P.^Aff2; Boyce, Brad L.^{Aff1, Aff2}
Source:	Journal of Electronic Materials. 55(4):3902-3909
Database:	Springer Nature Journals