Effects of Sputtering Pressure and Target–Substrate Distance on Phase Formation and Mechanical Behavior of Magnetron-Sputtered α-Ta Coatings
| Title: | Effects of Sputtering Pressure and Target–Substrate Distance on Phase Formation and Mechanical Behavior of Magnetron-Sputtered α-Ta Coatings |
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| Authors: | Xu, ShupengAff1, Aff2; Liu, CuicuiAff2, Aff3; Luo, LinAff1, Aff2, IDs1183702608290w_cor1 |
| Source: | JOM: The Journal of The Minerals, Metals & Materials Society (TMS). 78(6):5666-5678 |
| Database: | Springer Nature Journals |