Mechanical understanding of 100 mm InP and GaAs direct bonded heterostructure
| Title: | Mechanical understanding of 100 mm InP and GaAs direct bonded heterostructure |
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| Authors: | Imbert, B.; Blot, X.; Tauzin, A.; Salvetat, T.; Lagoutte, E.; Lecouvey, C.; Chaira, T.; Larrey, V.; Bridoux, C.; Fournel, F.; Delaye, V.; Papon, A.-M.; Moriceau, H.; Carron, V. |
| Source: | Microsystem Technologies: Micro- and Nanosystems Information Storage and Processing Systems. May 2015 21(5):973-977 |
| Database: | Springer Nature Journals |