Formation of All-Silicon Metasurfaces for Sensor Devices
| Title: | Formation of All-Silicon Metasurfaces for Sensor Devices |
|---|---|
| Authors: | Klimin, V. S.Aff1, IDS1063739725601729_cor1; Gusev, E. Yu.Aff1; Polyakov, V. V.Aff1; Jiang, H.Aff2; Wang, S.Aff2; Jiang, L.Aff2; Wang, Z.Aff2; Zhang, W.Aff2; Ageev, O. A.Aff1 |
| Source: | Russian Microelectronics. 54(8):1065-1069 |
| Database: | Springer Nature Journals |