Shallow Junction Engineering by Phosphorus and Carbon Co-implantation: Optimization of Carbon Dose and Energy
| Title: | Shallow Junction Engineering by Phosphorus and Carbon Co-implantation: Optimization of Carbon Dose and Energy |
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| Authors: | Cagnat, NathalieAff1; Laviron, CyrilleAff2; Mathiot, DanielAff3; Rando, ChrisAff4; Juhel, MarcAff5 |
| Source: | MRS Online Proceedings Library. 994(1) |
| Database: | Springer Nature Journals |