Impedance Spectroscopy of SOI Structures with BOX Nanolayers and a CO+ Implanted High-Resistance Region in Silicon Substrate
| Title: | Impedance Spectroscopy of SOI Structures with BOX Nanolayers and a CO+ Implanted High-Resistance Region in Silicon Substrate |
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| Authors: | Popov, V. P.Aff1, IDS1062873826700036_cor1; Zhilitskiy, V. E.Aff1; Antonov, V. A.Aff1; Tikhonenko, F. V.Aff1; Gutakovskii, A. K.Aff1 |
| Source: | Bulletin of the Russian Academy of Sciences: Physics. 90(4):502-507 |
| Database: | Springer Nature Journals |