Machine learning-driven metastructure design for sensor-free linearization of MEMS electrothermal actuators
| Title: | Machine learning-driven metastructure design for sensor-free linearization of MEMS electrothermal actuators |
|---|---|
| Authors: | Zhang, LingzhiAff1; Mofatteh, HosseinAff2; Kong, JonathanAff3; Howe, Jane Y.Aff3, Aff4; Dogel, StasAff5; Sun, YuAff6, IDs41378025010654_cor1; Akbarzadeh, AbdolhamidAff1, Aff2, IDs41378025010654_cor2; Cao, ChanghongAff1, IDs41378025010654_cor3 |
| Source: | Microsystems & Nanoengineering. 11(1) |
| Database: | Springer Nature Journals |