III-Nitride MEMS drum resonators on flexible metal substrates
| Title: | III-Nitride MEMS drum resonators on flexible metal substrates |
|---|---|
| Authors: | Kassem, A.Aff1; Gujrati, R.Aff1; Bourrier, D.Aff2; Ayela, C.Aff3; Mathieu, F.Aff2; Dufour, I.Aff3; Nicu, L.Aff2; Ottapilakkal, V.Aff1; Vuong, P.Aff1, Aff4; Sundaram, S.Aff1, Aff4; Hunt, W.Aff5; Ougazzaden, A.Aff1, Aff4; Leichlé, T.Aff1, Aff2, Aff5, IDs41378025009953_cor1; Salvestrini, J. P.Aff1, Aff4, Aff5, IDs41378025009953_cor2 |
| Source: | Microsystems & Nanoengineering. 11(1) |
| Database: | Springer Nature Journals |