Effect of Piezoelectric Layer on Resonant Frequency of Silicon MEMS Membranes
| Title: | Effect of Piezoelectric Layer on Resonant Frequency of Silicon MEMS Membranes |
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| Authors: | Gusev, E. Yu.Aff1, IDS1063739725601833_cor1; Petrova, S. V.Aff1; Jiang, L.Aff2; Klimin, V. S.Aff1; Polyakov, V. V.Aff1; Han, L.Aff2, Aff3; Wang, S.Aff2; Wang, Z.Aff2; Zhang, W.Aff3; Ageev, O. A.Aff1 |
| Source: | Russian Microelectronics. 54(8):1142-1146 |
| Database: | Springer Nature Journals |