Discharge Plasma Parameters of Magnetron Sputtering System in Gas and Vacuum (Gasless) Operating Modes
| Title: | Discharge Plasma Parameters of Magnetron Sputtering System in Gas and Vacuum (Gasless) Operating Modes |
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| Authors: | Shandrikov, M. V.Aff1, IDS1062873825714503_cor1; Bugaev, A. S.Aff1; Cherkasov, A. A.Aff1; Gridilev, V. D.Aff1; Kovalsky, S. S.Aff1; Savkin, K. P.Aff1; Yushkov, G. Yu.Aff1 |
| Source: | Bulletin of the Russian Academy of Sciences: Physics. 89(Suppl 2):S277-S283 |
| Database: | Springer Nature Journals |