Prediction of Characteristics of Inductive Coupled Radio Frequency Discharge at Low Pressure in One-Dimensional Approximation Using Neural Network Approach
| Title: | Prediction of Characteristics of Inductive Coupled Radio Frequency Discharge at Low Pressure in One-Dimensional Approximation Using Neural Network Approach |
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| Authors: | Skvortsov, I. V.Aff1, IDS0018143924701273_cor1; Shemakhin, A. Y.Aff1; Danilov, I. Y.Aff1; Gaskova, D. A.Aff1, Aff2 |
| Source: | High Energy Chemistry. 58(Suppl 3):S421-S424 |
| Database: | Springer Nature Journals |