Stability of flexible composite stamps with thermal nanoimprint
| Title: | Stability of flexible composite stamps with thermal nanoimprint |
|---|---|
| Authors: | Papenheim, MarcAff1, cor1; Eidemüller, WolfgangAff1; Steinberg, ChristianAff1; Mayer, AndreAff1; Götz, JohannesAff2; Nees, DieterAff2; Scheer, Hella-ChristinAff1 |
| Source: | Applied Physics A: Materials Science & Processing. 124(8) |
| Database: | Springer Nature Journals |