On the Issue of Crack Formation in a Thin Dielectric Layer on Silicon under Thermal Shock
| Title: | On the Issue of Crack Formation in a Thin Dielectric Layer on Silicon under Thermal Shock |
|---|---|
| Authors: | Skvortsov, Arkadiy A.Aff1, IDs11665020049254_cor1; Koryachko, Marina V.Aff2; Skvortsov, Pavel A.Aff3; Luk’yanov, Mikhail N.Aff1 |
| Source: | Journal of Materials Engineering and Performance. 29(7):4390-4395 |
| Database: | Springer Nature Journals |