Analysis of Thermomechanical Stresses in Silicon During Heating of Aluminum Interconnects on its Surface by a Pulse Current
| Title: | Analysis of Thermomechanical Stresses in Silicon During Heating of Aluminum Interconnects on its Surface by a Pulse Current |
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| Authors: | Skvortsov, Arkady A.Aff1, IDs12633023023532_cor1; Nikolaev, Vladimir K.Aff1; Koryachko, Marina V.Aff1; Skvortsov, Pavel A.Aff2; Volkov, Evgeniy I.Aff1 |
| Source: | Silicon. 15(10):4417-4424 |
| Database: | Springer Nature Journals |