Gallium nitride MEMS resonators: how residual stress impacts design and performances
| Title: | Gallium nitride MEMS resonators: how residual stress impacts design and performances |
|---|---|
| Authors: | Morelle, Christophe; Théron, Didier; Derluyn, Joff; Degroote, Stefan; Germain, Marianne; Zhang, Victor; Buchaillot, Lionel; Grimbert, Bertrand; Tilmant, Pascal; Vaurette, François; Roch-Jeune, Isabelle; Brandli, Virginie; Avramovic, Vanessa; Okada, Etienne; Faucher, Marc |
| Source: | Microsystem Technologies: Micro- and Nanosystems Information Storage and Processing Systems. :1-7 |
| Database: | Springer Nature Journals |