New control system of the multiple filaments in the large ion source for ion doping system iG6 Ver.2
| Title: | New control system of the multiple filaments in the large ion source for ion doping system iG6 Ver.2 |
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| Authors: | Hirai, YuyaAff1, IDs4358002200388y_cor1; Watari, KenjiAff1; Orihira, KoichiAff1; Matsumoto, TakeshiAff2; Tatemichi, JunichiAff1; Inouchi, YutakaAff1 |
| Source: | MRS Advances. 7(36):1495-1498 |
| Database: | Springer Nature Journals |