Advanced Anodic Bonding Processes For MEMS Applications
| Title: | Advanced Anodic Bonding Processes For MEMS Applications |
|---|---|
| Authors: | Dragoi, V.Aff1; Lindner, P.Aff1; Glinsner, T.Aff1; Wimplinger, M.Aff2; Farrens, S.Aff2 |
| Source: | MRS Online Proceedings Library. 782(1) |
| Database: | Springer Nature Journals |