Preparation of Piezoelectric PZT Thin Films by Mocvd for MEMS Applications
| Title: | Preparation of Piezoelectric PZT Thin Films by Mocvd for MEMS Applications |
|---|---|
| Authors: | Chen, Ing-ShinAff180, IDArt80_cor1; Kim, Dong-JooAff280; Maria, Jon-PaulAff280; Roeder, Jeffery F.Aff180; Kingon, Angus I.Aff280 |
| Source: | MRS Online Proceedings Library. 596(1):541-547 |
| Database: | Springer Nature Journals |