Materials science of thin films
Titel: | Materials science of thin films : deposition and structure / Milton Ohring |
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Verfasser: | |
Ausgabe: | 2. ed. |
Veröffentlicht: | San Diego, Calif. : Academic Press, 2002 |
Umfang: | XXI, 794 S. : Ill. |
Format: | E-Book |
Sprache: | Englisch |
RVK-Notation: |
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Vorliegende Ausgabe: | Online-Ausg.: 2003. - Online-Ressource. |
ISBN: | 0585470979 (Sekundärausgabe) ; 9780585470979 (Sekundärausgabe) |
Hinweise zum Inhalt: |
Inhaltsbeschreibung der Sammlung und Zugangshinweise
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alg: 18229090 001A $00030:06-11-06 001B $01999:20-08-22 $t18:38:56.000 001C $05000:21-06-13 $t12:44:51.000 001D $00030:24-01-07 001U $0utf8 001X $00 002@ $0Oau 003@ $0182290905 004G $00-585-47097-9 $felectronic bk. 004G $A978-0-585-47097-9 007A $0182290905 $aHEB 009P $3Inhaltsbeschreibung der Sammlung und Zugangshinweise $uhttp://www.nationallizenzen.de/angebote/nlproduct.2006-03-20.4421392276 009Q $SV153 $uhttp://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=92177 $xH 010@ $aeng 011@ $a2002 011B $a2003 016A $aDguu 017B $aZDB-1-NEL 021A $aMaterials science of thin films $ddeposition and structure $hMilton Ohring 028A $D20220215 $Ecgwrk $7142351490 $8Ohring, Milton$Z1936- [Tp3] $9227291530 032@ $a2. ed. 032C $a[Online-Ausg.] 033A $pSan Diego, Calif. $nAcademic Press 033Q $aOnline-Ressource 034D $aXXI, 794 S. 034M $aIll. 037G $aOnline-Ausg.: 044K $RSchicht $RDünnschichttechnik $RFlüssigkeitsfilm $RVergrabene Schicht $#Thin films $#Couches minces $#Thin film $#Dünne Schichten $74136925-7 $8Dünne Schicht [Ts1] $9085511013 044K $RSchichttechnik $RDünne Schicht $RAufdampfen $#Thin film devices $#Dispositifs à couches minces $#Dünnfilmtechnik $#Dünnfilmtechnologie $74136339-5 $8Dünnschichttechnik [Ts1] $9085506621 044K $#Materials science $#Science des matériaux $#Materialwissenschaft $#Werkstofftechnologie $#Materialkunde $#Werkstoffwissenschaften $#Werkstofftechnik $#Materialwissenschaft $#Werkstoffwissenschaft $74079184-1 $8Werkstoffkunde [Ts1] $9085224693 045A $aTA418.9.T45 045B $a621.38152 045E $c620 045Z $8UP 7550 [Tkv] $9412619172 045Z $8UP 7500 [Tkv] $9412619164 045Z $8ZN 4150 [Tkv] $9415104521 046M $aA review of materials science. - Vacuum science and technology. - Thin-film evaporation processes. - Discharges, plasmas, and ion-surface interactions. - Plasma and ion beam processing of thin films. - Chamical vapor deposition. - Substrate surfaces and thin-film nucleation. - Epitaxy. - Film structure. - Characterixation of thin films and surfaces. - Interdiffusion, reactions, and transformations in thin films. - Mechanical properties of thin films lok: 18229090 3 101B $006-11-06 $t07:33:56.000 101C $006-11-06 145S/01 $a019 101U $0utf8 exp: 18229090 3 1 #EPN 201B/01 $002-02-24 $t22:52:41.000 201U/01 $0utf8 203@/01 $0477653030 208@/01 $a06-11-06 $bl 209S/01 $SV153 $uhttp://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=92177 $XH lok: 18229090 5 exp: 18229090 5 1 #EPN 201B/01 $019-06-13 $t23:26:29.000 201U/01 $0utf8 203@/01 $0477653049 208@/01 $a06-11-06 $bl 209S/01 $SV153 $uhttp://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=92177 $XH lok: 18229090 6 exp: 18229090 6 1 #EPN 201B/01 $019-06-13 $t23:26:30.000 201U/01 $0utf8 203@/01 $0579699153 208@/01 $a23-07-09 $bl 209S/01 $SV153 $uhttp://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=92177 $XH lok: 18229090 8 exp: 18229090 8 1 #EPN 201B/01 $019-06-13 $t23:26:30.000 201U/01 $0utf8 203@/01 $0477653057 208@/01 $a06-11-06 $bl 209S/01 $SV153 $uhttp://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=92177 $XH lok: 18229090 10 exp: 18229090 10 1 #EPN 201B/01 $019-06-13 $t23:26:30.000 201U/01 $0utf8 203@/01 $0477653065 208@/01 $a06-11-06 $bl 209S/01 $SV153 $uhttp://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=92177 $XH lok: 18229090 11 exp: 18229090 11 1 #EPN 201B/01 $019-06-13 $t23:26:30.000 201U/01 $0utf8 203@/01 $0477653073 208@/01 $a06-11-06 $bl 209S/01 $SV153 $uhttp://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=92177 $XH lok: 18229090 15 exp: 18229090 15 1 #EPN 201B/01 $019-06-13 $t23:26:30.000 201U/01 $0utf8 203@/01 $0595558097 208@/01 $a29-06-10 $bl 209S/01 $SV153 $uhttp://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=92177 $XH lok: 18229090 20 exp: 18229090 20 1 #EPN 201B/01 $019-06-13 $t23:26:30.000 201U/01 $0utf8 203@/01 $047765309X 208@/01 $a06-11-06 $bl 209S/01 $SV153 $uhttp://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=92177 $XH lok: 18229090 21 exp: 18229090 21 1 #EPN 201B/01 $019-06-13 $t23:26:30.000 201U/01 $0utf8 203@/01 $0477653103 208@/01 $a06-11-06 $bl 209S/01 $SV153 $uhttp://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=92177 $XH lok: 18229090 23 exp: 18229090 23 1 #EPN 201B/01 $019-06-13 $t23:26:30.000 201U/01 $0utf8 203@/01 $0477653111 208@/01 $a06-11-06 $bl 209S/01 $SV153 $uhttp://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=92177 $XH lok: 18229090 24 exp: 18229090 24 1 #EPN 201B/01 $019-06-13 $t23:26:30.000 201U/01 $0utf8 203@/01 $0595558100 208@/01 $a29-06-10 $bl 209S/01 $SV153 $uhttp://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=92177 $XH lok: 18229090 25 exp: 18229090 25 1 #EPN 201B/01 $019-06-13 $t23:26:30.000 201U/01 $0utf8 203@/01 $047765312X 208@/01 $a06-11-06 $bl 209S/01 $SV153 $uhttp://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=92177 $XH lok: 18229090 36 exp: 18229090 36 1 #EPN 201B/01 $019-06-13 $t23:26:30.000 201U/01 $0utf8 203@/01 $0595558119 208@/01 $a29-06-10 $bl 209S/01 $SV153 $uhttp://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=92177 $XH lok: 18229090 59 exp: 18229090 59 1 #EPN 201B/01 $019-06-13 $t23:26:30.000 201U/01 $0utf8 203@/01 $0503676713 208@/01 $a10-05-07 $bl 209S/01 $SV153 $uhttp://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=92177 $XH lok: 18229090 76 exp: 18229090 76 1 #EPN 201B/01 $029-10-16 $t08:29:07.183 201U/01 $0utf8 203@/01 $078579686X 208@/01 $a29-10-16 $bl 209S/01 $SV153 $uhttp://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=92177 $XH lok: 18229090 204 101B $028-01-13 $t15:47:04.000 101C $012-02-08 101U $0utf8 145S/01 $a25g0e 145S/02 $a2400e exp: 18229090 204 1 #EPN 201B/01 $019-06-13 $t23:26:30.000 201U/01 $0utf8 203@/01 $0477653154 208@/01 $a06-11-06 $bl 209S/01 $SV153 $uhttp://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=92177 $XH lok: 18229090 205 exp: 18229090 205 1 #EPN 201B/01 $019-06-13 $t23:26:30.000 201U/01 $0utf8 203@/01 $0477653162 208@/01 $a06-11-06 $bl 209S/01 $SV153 $uhttp://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=92177 $XH
LEADER | 00000cam a2200000 c 4500 | ||
---|---|---|---|
001 | 182290905 | ||
003 | DE-603 | ||
005 | 20220820183856.0 | ||
007 | cr|||||||||||| | ||
008 | 061106s2002 xx |||| o| u00||u|eng c | ||
020 | |a 0585470979 (Sekundärausgabe) |c electronic bk. | ||
020 | |a 9780585470979 (Sekundärausgabe) | ||
035 | |a (DE-599)HEB182290905 | ||
040 | |a DE-603 |b ger |c DE-603 |d DE-603 | ||
041 | |a eng | ||
050 | 0 | |a TA418.9.T45 | |
082 | 7 | |a 621.38152 | |
084 | |a 620 |q DE-101 |2 sdnb | ||
084 | |a UP 7550 |0 (DE-625)146434: |0 (DE-603)412619172 |2 rvk | ||
084 | |a UP 7500 |0 (DE-625)146433: |0 (DE-603)412619164 |2 rvk | ||
084 | |a ZN 4150 |0 (DE-625)157360: |0 (DE-603)415104521 |2 rvk | ||
100 | 1 | |a Ohring, Milton |d 1936- |0 (DE-603)227291530 |0 (DE-588)142351490 |2 gnd | |
245 | 0 | 0 | |a Materials science of thin films |b deposition and structure |c Milton Ohring |
250 | |a 2. ed. | ||
264 | 1 | |a San Diego, Calif. |b Academic Press |c 2002 | |
300 | |a XXI, 794 S. |b Ill. | ||
500 | |a A review of materials science. - Vacuum science and technology. - Thin-film evaporation processes. - Discharges, plasmas, and ion-surface interactions. - Plasma and ion beam processing of thin films. - Chamical vapor deposition. - Substrate surfaces and thin-film nucleation. - Epitaxy. - Film structure. - Characterixation of thin films and surfaces. - Interdiffusion, reactions, and transformations in thin films. - Mechanical properties of thin films | ||
530 | |a Online-Ausg.: | ||
533 | |a Online-Ausg. |d 2003 |e Online-Ressource |n ISBN 0585470979 electronic bk. |n ISBN 9780585470979 |7 s2003uuuuxx u| |n [Online-Ausg.] | ||
650 | 7 | |a Dünne Schicht |0 (DE-588)4136925-7 |0 (DE-603)085511013 |2 gnd | |
650 | 7 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |0 (DE-603)085506621 |2 gnd | |
650 | 7 | |a Werkstoffkunde |0 (DE-588)4079184-1 |0 (DE-603)085224693 |2 gnd | |
856 | |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=92177 |x Verlag | ||
856 | 4 | 2 | |u http://www.nationallizenzen.de/angebote/nlproduct.2006-03-20.4421392276 |3 Inhaltsbeschreibung der Sammlung und Zugangshinweise |
912 | |a ZDB-1-NEL | ||
924 | 1 | |9 603 |a (DE-603)477653030 |b DE-603 |c HES |d d | |
924 | 1 | |9 603 |a (DE-603)477653049 |b DE-603 |c HES |d d | |
924 | 1 | |9 603 |a (DE-603)579699153 |b DE-603 |c HES |d d | |
924 | 1 | |9 603 |a (DE-603)477653057 |b DE-603 |c HES |d d | |
924 | 1 | |9 603 |a (DE-603)477653065 |b DE-603 |c HES |d d | |
924 | 1 | |9 603 |a (DE-603)477653073 |b DE-603 |c HES |d d | |
924 | 1 | |9 603 |a (DE-603)595558097 |b DE-603 |c HES |d d | |
924 | 1 | |9 603 |a (DE-603)47765309X |b DE-603 |c HES |d d | |
924 | 1 | |9 603 |a (DE-603)477653103 |b DE-603 |c HES |d d | |
924 | 1 | |9 603 |a (DE-603)477653111 |b DE-603 |c HES |d d | |
924 | 1 | |9 603 |a (DE-603)595558100 |b DE-603 |c HES |d d | |
924 | 1 | |9 603 |a (DE-603)47765312X |b DE-603 |c HES |d d | |
924 | 1 | |9 603 |a (DE-603)595558119 |b DE-603 |c HES |d d | |
924 | 1 | |9 603 |a (DE-603)503676713 |b DE-603 |c HES |d d | |
924 | 1 | |9 603 |a (DE-603)78579686X |b DE-603 |c HES |d d | |
924 | 1 | |9 603 |a (DE-603)477653154 |b DE-603 |c HES |d d | |
924 | 1 | |9 603 |a (DE-603)477653162 |b DE-603 |c HES |d d |